Atomic Column Elemental Mapping by STEM-Moiré Method
نویسندگان
چکیده
Atomic column elemental mapping is realized by electron energy loss spectroscopy (EELS) and/or energy dispersive X-ray spectroscopy (EDS) [1], with modern technologies of electron microscopy such as an aberration corrector [2]. The method is widely utilized in materials and physical sciences, since atomic species and positions in a crystalline specimen can be determined directly. A crucial issue to perform the mapping is specimen damage due to high electron dose onto a specimen, since ionization cross section for the core electron excitation is so low.
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